Optical properties of polycrystalline <beta>-SiC membrane for x-ray mask

Tsutomu Shoki; Yoichi Yamaguchi; Noromichi Annaka; Isao Amemiya

doi:10.1117/12.191943

3 November 1994 Optical properties of polycrystalline β-SiC membrane for x-ray mask

Tsutomu Shoki, Yoichi Yamaguchi, Noromichi Annaka, Isao Amemiya

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191943
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

Optical properties of poly-crystalline (beta) -SiC membrane deposited by LPCVD have been investigated in detail. The SiC films have a high refractive index value of 2.63 and a low extinction coefficient (k) of 0.0065 at wavelength of 633 nm. Optical transmittance increased as the SiC surface roughness decreased. Peak transmittance at 633 nm for 1.0 micrometers -thick polished SiC membrane with extremely smooth surface of 2 nm Rmax is limited to 83% due to the absorption of the membrane. The transmittance of the polished SiC membrane has increased up to 86% due to reduction in k after annealing at 1050 degree(s)C. Al₂O₃ film was the most suitable for the SiC film among anti-reflection (AR) materials studied. The attained transmittance values at 633 nm for the as-deposited, the polished and the annealed SiC membranes of 1.0 micrometers in thickness with Al₂O₃ AR films were, 83%, 88% and 91%, respectively.

Citation Download Citation

Tsutomu Shoki, Yoichi Yamaguchi, Noromichi Annaka, and Isao Amemiya "Optical properties of polycrystalline β-SiC membrane for x-ray mask", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191943

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available