Characterization of the cathode spot in vacuum-arc deposition

Hao Wang; Jiyan Zou; Mao-lin Li; Li-chun Cheng; Hong Lin Yang

doi:10.1117/12.174645

1 May 1994 Characterization of the cathode spot in vacuum-arc deposition

Hao Wang, Jiyan Zou, Mao-lin Li, Li-chun Cheng, Hong Lin Yang

Proceedings Volume 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum; (1994) https://doi.org/10.1117/12.174645
Event: XVI International Symposium on Discharges and Electrical Insulation in Vacuum, 1994, Moscow-St. Petersburg, Russian Federation

Abstract

Characterization of the cathode spot, which connect to a vacuum dc arc on a consumable cathode as a source of material for deposition, is studied using a high speed photograph technique. For a titanium cathode, external magnetic field effects on the behavior of the cathode spot is given with respect to number, size, and motion. Lastly, some discussion to the experimental results are presented.

Citation Download Citation

Hao Wang, Jiyan Zou, Mao-lin Li, Li-chun Cheng, and Hong Lin Yang "Characterization of the cathode spot in vacuum-arc deposition", Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); https://doi.org/10.1117/12.174645

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available