Vacuum-arc plasma deposition: macroparticle filtering, scaling, and other problems

Andre Anders; Simone Anders; Ian G. Brown; Robert A. MacGill; Michael R. Dickinson

doi:10.1117/12.174640

1 May 1994 Vacuum-arc plasma deposition: macroparticle filtering, scaling, and other problems

Andre Anders, Simone Anders, Ian G. Brown, Robert A. MacGill, Michael R. Dickinson

Proceedings Volume 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum; (1994) https://doi.org/10.1117/12.174640
Event: XVI International Symposium on Discharges and Electrical Insulation in Vacuum, 1994, Moscow-St. Petersburg, Russian Federation

Abstract

Micron-size macroparticles can be removed from vacuum arc plasmas using magnetic filters, permitting the deposition of high-quality thin films of the cathode material. The principle of magnetic filtering is explained, and ways of improving filter efficiency using additional electric and magnetic fields are explored. Under optimum conditions, about 25% of all ions entering the filter can be used for deposition. Other problems such as down or upscaling of deposition facilities are briefly discussed.

Citation Download Citation

Andre Anders, Simone Anders, Ian G. Brown, Robert A. MacGill, and Michael R. Dickinson "Vacuum-arc plasma deposition: macroparticle filtering, scaling, and other problems", Proc. SPIE 2259, XVI International Symposium on Discharges and Electrical Insulation in Vacuum, (1 May 1994); https://doi.org/10.1117/12.174640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available