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14 September 1994 Polarimetry and scatterometry using a Wollaston polarimeter
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Abstract
A high precision polarimeter based on a dual-beam analyzer prism is capable of polarimetric accuracy's near +0.2% over the visible to near-IR range. Accuracy's were determined using computed Fresnel polarizances from fused silica at several incidence angles. A comparison of polarization measurements made at several different laboratories is presented.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Conrad Wells, Samuel F. Pellicori, and Mike Pavlov "Polarimetry and scatterometry using a Wollaston polarimeter", Proc. SPIE 2265, Polarization Analysis and Measurement II, (14 September 1994); https://doi.org/10.1117/12.186658
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