Spectroscopic imaging of atmospheric-pressure helium inductively coupled plasma (ICP) discharges

Akbar Montaser; Anna-Lisa M. Boyes; Mingxiang Cai; Chunming Hsiech; Hao Zhang

doi:10.1117/12.187590

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30 September 1994 Spectroscopic imaging of atmospheric-pressure helium inductively coupled plasma (ICP) discharges

Akbar Montaser, Anna-Lisa M. Boyes, Mingxiang Cai, Chunming Hsiech, Hao Zhang

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Proceedings Volume 2266, Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research; (1994) https://doi.org/10.1117/12.187590
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Spatially resolved information from atmospheric-pressure helium inductively coupled plasmas (He ICP) was acquired with a simple, inexpensive optical imaging spectrometer. The system uses a 35-cm focal length Czerny-Turner monochromator/spectrograph and a solid state charge-injection device (CID) or a charge coupled device (CCD). Quantitative image maps of the plasmas were produced with good resolution. For example, when the CID was used, the entire plasma image could be monitored with a spatial resolution of 0.13 and 0.10 mm in the horizontal and vertical directions. The spectral resolution was 4 nm. Lateral distributions of emission intensities were converted, using an Abel inversion routine, to radial distributions. Some unique features of the He ICP, compared to the commonly used Ar ICP, were identified at or around analytical conditions for elemental analysis of gaseous and aqueous samples.

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Akbar Montaser, Anna-Lisa M. Boyes, Mingxiang Cai, Chunming Hsiech, and Hao Zhang "Spectroscopic imaging of atmospheric-pressure helium inductively coupled plasma (ICP) discharges", Proc. SPIE 2266, Optical Spectroscopic Techniques and Instrumentation for Atmospheric and Space Research, (30 September 1994); https://doi.org/10.1117/12.187590

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