Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions

Leonid I. Goray

doi:10.1117/12.180012

12 July 1994 Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions

Leonid I. Goray

Proceedings Volume 2278, X-Ray and UV Detectors; (1994) https://doi.org/10.1117/12.180012
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

It was found that grating efficiency in short spectral range has unpredictable changes both under the alterations in groove geometry, groove frequency, angle of incidence and wavelength; and under replacement of reflectance, i.e. under the use of another coating material with the stand point of scalar theory. As is shown, this non-scalar effect becomes greatly apparent only for high-frequency gratings (up to 3600 g/mm) and includes two aspects. They are: (1) it is impossible to predict grating efficiency under the changing of coating material (without changes of all the other parameters) by multiplication on the ratio of coating material Fresnel reflectance; (2) optimum parameters (angle of incidence, groove depth, groove width for lamellar grating) found for one kind of coating material are not optimum for another.

Citation Download Citation

Leonid I. Goray "Nonscalar properties of high groove frequency gratings for soft x-ray and XUV regions", Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); https://doi.org/10.1117/12.180012

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