Bremsstrahlung optical monitoring system (BOMS) for in-situ spectral characterization and optical film thickness monitoring of electron beam evaporated x-ray coatings and multilayers: design concept

Muamer Zukic; Michele Wilson McColgan; Douglas G. Torr; Alphonsus John Fennelly; Edward L. Fry

doi:10.1117/12.193139

11 November 1994 Bremsstrahlung optical monitoring system (BOMS) for in situ spectral characterization and optical film thickness monitoring of electron beam evaporated x-ray coatings and multilayers: design concept

Muamer Zukic, Michele Wilson McColgan, Douglas G. Torr, Alphonsus John Fennelly, Edward L. Fry

Author Affiliations +

Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193139
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

It is well known that in addition to roughness control, the most critical factor in the fabrication of x-ray multilayers is the accuracy of film thickness monitoring. Thickness accuracy and reproducibility of the x-ray multilayer deposition process can be improved by compensating for the film thickness variations in subsequent layers. We report the design of the `Bremsstrahlung Optical Monitoring System' (BOMS) for in situ multilayer spectral reflectance measurements and individual film optical thickness monitoring. The designed monitoring system, BOMS, utilizes the bremsstrahlung that occur during an electron beam deposition as the x-ray source and two energy sensitive detectors for the reference and sample beam reflectance measurements. In addition, the BOMS will create a powerful tool for in situ multilayer design, thus providing fabricated x-ray coatings with ultimate spectral performance.

Citation Download Citation

Muamer Zukic, Michele Wilson McColgan, Douglas G. Torr, Alphonsus John Fennelly, and Edward L. Fry "Bremsstrahlung optical monitoring system (BOMS) for in situ spectral characterization and optical film thickness monitoring of electron beam evaporated x-ray coatings and multilayers: design concept", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193139

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