Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region

Ulf Kleineberg; Hans-Juergen Stock; D. Menke; K. Osterried; Bernt Schmiedeskamp; Ulrich Heinzmann; Detlef Fuchs; Peter Mueller; Frank Scholze; Klaus F. Heidemann; Bruno Nelles; Juergen Thieme

doi:10.1117/12.193143

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11 November 1994 Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region

Ulf Kleineberg, Hans-Juergen Stock, D. Menke, K. Osterried, Bernt Schmiedeskamp, Ulrich Heinzmann, Detlef Fuchs, Peter Mueller, Frank Scholze, Klaus F. Heidemann, Bruno Nelles, Juergen Thieme

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Proceedings Volume 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics; (1994) https://doi.org/10.1117/12.193143
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Here we report on the fabrication and analysis of two different types of laterally structured multilayers, which act as highly efficient x-ray optical elements for focusing or spectral dispersion of soft x-rays at (near) normal incidence. The microfocusing of soft x-rays at (near) normal incidence with plane reflection optics can be obtained by multilayer Bragg-Fresnel zone plates. A circular condensor zone plate structure (2.9 mm diameter, 417 zones, inner zone radius 50 micrometers , outer zone width 0.9 micrometers ) has been recorded by holographic lithography followed by ion beam etching into a Mo-Si multilayer mirror of 24 periods and a doublelayer thickness of 7.2 nm. The focusing properties analyzed by soft x-ray reflectometry at (lambda) equals 13.8 nm show a focal spot size smaller than 40 micrometers measured 160 mm behind the multilayer zone plate. Multilayer blazed gratings offer the opportunity for highly resolved spectral dispersion of soft x-rays due to the possible combination of high efficiency and high diffraction orders with almost the whole intensity diffracted in one diffraction order. The sawtooth profile of a blazed grating structure (1221 l/mm, blaze angle 1.5 degree(s)) has been ruled into a 200 nm thick Au-film which has been deposited onto a plane glass substrate. A Mo/Si multilayer of 15 periods and a doublelayer thickness of 7.2 nm has been deposited onto the grating substrate. In order to smooth the rough Au-surface and to prevent interdiffusion of the Au-film with the upper Mo-Si multilayer a carbon film has been evaporated onto the Au-grating surface before the deposition of the soft x-ray coating. This procedure results in a significant increase of diffraction efficiency. The multilayer grating has been matched working on blaze in the third diffraction order, where an absolute diffraction efficiency of 3.4% at (lambda) equals 14 nm has been measured, while only 1.1% has been achieved for a similar grating without a carbon interlayer.

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Ulf Kleineberg, Hans-Juergen Stock, D. Menke, K. Osterried, Bernt Schmiedeskamp, Ulrich Heinzmann, Detlef Fuchs, Peter Mueller, Frank Scholze, Klaus F. Heidemann, Bruno Nelles, and Juergen Thieme "Multilayer reflection-type zone plates and blazed gratings for the normal incidence soft x-ray region", Proc. SPIE 2279, Advances in Multilayer and Grazing Incidence X-Ray/EUV/FUV Optics, (11 November 1994); https://doi.org/10.1117/12.193143

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