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14 September 1994 Recent results in diamond UV detector research
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Diamond has long been recognized as a promising material for fabricating robust, solar-blind radiation detectors. Its electrical as well as mechanical and chemical properties suggest that detectors made from diamond will not be limited by the dark current and response instabilities that plague silicon devices. In this work, we present initial results from our program to fabricate a two dimensional imager using synthetic diamond. We have observed the desired low dark current and VUV spectral response properties in metal-semiconductor-metal (MSM) detectors made on intrinsic type-IIa diamond. Selective, near-UV response has been produced in diamond diodes. Integrating photoresponse was observed in MIS capacitors fabricated on type IIb (p-type) diamond. Subsequent modelling of the MIS photoresponse supports the conclusion that electrons are stored at the diamond-insulator interface which makes it feasible to consider a diamond CCD. We discuss relevant processing steps and a plan to make a thin, back-illuminated CCD suitable for VUV and near-UV imaging applications.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mike Marchywka, Steven C. Binari, Pehr E. Pehrsson, and J. Daniel Moses "Recent results in diamond UV detector research", Proc. SPIE 2282, Ultraviolet Technology V, (14 September 1994);


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