Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors

Augusto Garcia-Valenzuela; Massood Tabib-Azar

doi:10.1117/12.190901

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21 October 1994 Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors

Augusto Garcia-Valenzuela, Massood Tabib-Azar

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Proceedings Volume 2291, Integrated Optics and Microstructures II; (1994) https://doi.org/10.1117/12.190901
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Immense computational power of today's processors cannot be fully utilized unless appropriate sensors and actuators are developed to link them with the outside world. A method is presented here to compare different sensors with each other and to evaluate their relative merits. Sensors are decomposed into two essential building blocks: a sensor shell and a sensing mean. Eleven different types of sensors, having the same sensing shells, are analyzed and compared to each other.

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Augusto Garcia-Valenzuela and Massood Tabib-Azar "Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190901

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