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21 October 1994 Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors
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Abstract
Immense computational power of today's processors cannot be fully utilized unless appropriate sensors and actuators are developed to link them with the outside world. A method is presented here to compare different sensors with each other and to evaluate their relative merits. Sensors are decomposed into two essential building blocks: a sensor shell and a sensing mean. Eleven different types of sensors, having the same sensing shells, are analyzed and compared to each other.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Augusto Garcia-Valenzuela and Massood Tabib-Azar "Comparative study of piezoelectric, piezoresistive, electrostatic, magnetic, and optical sensors", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190901
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