Integrated optical interferometer with micromechanical diaphragm for pressure sensing

Gregory N. De Brabander; Joseph T. Boyd; Glenn Beheim

doi:10.1117/12.190902

21 October 1994 Integrated optical interferometer with micromechanical diaphragm for pressure sensing

Gregory N. De Brabander, Joseph T. Boyd, Glenn Beheim

Proceedings Volume 2291, Integrated Optics and Microstructures II; (1994) https://doi.org/10.1117/12.190902
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

An electrically passive optical pressure sensor has been fabricated which uses a integrated-optical Y-junction ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. The transmissivity function of the resonator is derived and compared with measured response. This pressure sensor is rugged, amenable to batch fabrication, and it provides a link insensitive readout.

Citation Download Citation

Gregory N. De Brabander, Joseph T. Boyd, and Glenn Beheim "Integrated optical interferometer with micromechanical diaphragm for pressure sensing", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190902

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