Paper
21 October 1994 Novel integrated optical structures for sensing applications
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Abstract
There is an increasing interest in using an integrated optical waveguide as a displacement or pressure sensor. This paper provides a theoretical analysis of 3-D channel waveguides subjected to deformation. The analysis is rather general and can be extended to many practical channel waveguides. The motivation for this paper is to provide the designers of integrated optical sensors simple formulas to evaluate designs and material systems. Our analysis begins with a straight channel guide having an isotropic refractive index. In Section I, we consider the wave solutions to this channel waveguide using the Marcatili method. We give all the pertinent equations for performing first order calculations.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Wu and Massood Tabib-Azar "Novel integrated optical structures for sensing applications", Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190903
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KEYWORDS
Waveguides

Integrated optics

Refractive index

Sensors

Silicon

Channel waveguides

Wave propagation

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