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21 October 1994Vacuum-tuned graded index polymer waveguides on silicon substrates
A new method using vacuum-drying is demonstrated for producing graded index (GRIN) profiles on type-A photolime gel-based polymer waveguides. Vacuum-drying allows optical waveguides to be built on higher index of refraction substrates without intermediate lower index cladding layers. The waveguide loss and graded index profiles were compared for vacuum-dried and alcohol-dried samples.
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David J. Gerold, Ray T. Chen, "Vacuum-tuned graded index polymer waveguides on silicon substrates," Proc. SPIE 2291, Integrated Optics and Microstructures II, (21 October 1994); https://doi.org/10.1117/12.190918