Mask making: today's enabling technology

Stephen E. Cooper

doi:10.1117/12.195804

7 December 1994 Mask making: today's enabling technology

Stephen E. Cooper

Proceedings Volume 2322, 14th Annual BACUS Symposium on Photomask Technology and Management; (1994) https://doi.org/10.1117/12.195804
Event: 14th Annual BACUS Symposium on Photomask Technology and Management, 1994, Santa Clara, CA, United States

Abstract

Not since the late 1970s has the potential existed for maskmakers to provide such significant value to the device manufacturer. This paper addresses this emerging opportunity and the challenges it represents. In addition to opportunities, we look at possible setbacks as the industry returns from what has been accurately described as the seven-year vacation.

Citation Download Citation

Stephen E. Cooper "Mask making: today's enabling technology", Proc. SPIE 2322, 14th Annual BACUS Symposium on Photomask Technology and Management, (7 December 1994); https://doi.org/10.1117/12.195804

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