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12 October 1994 High-density optical disk mastering using UV light source
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Proceedings Volume 2338, 1994 Topical Meeting on Optical Data Storage; (1994)
Event: Optical Data Storage '94, 1994, Dana Point, CA, United States
For high density optical disk mastering processes, it is important to appropriately select the light source and optical layout as well as to optimize photoresist and exposure method. A g-line type photoresist is preferred for use in the mastering processes, compared with i-line type photoresist. By using the UV light source, the pit width is narrowed down to 0.25 micrometers , which is easily fabricated. Under preferred fabrication exposure power for cross talk and modulation amplitude, excellent jitter values, 8/8 ns, 10.8 ns and 16.9 ns were achieved for quadrupled, quintupled and 6-times density CD-ROMs.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shinichi Katsuda, Kenichi Ishizuka, Naoki Ohmura, and Katsu Yamada "High-density optical disk mastering using UV light source", Proc. SPIE 2338, 1994 Topical Meeting on Optical Data Storage, (12 October 1994);

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