Absolute interferometric testing of cylindraical surfaces

Thomas Bluemel; Karl-Edmund Elssner; Ricarda Kafka; Guenter Schulz; Andreas Vogel

doi:10.1117/12.195918

12 December 1994 Absolute interferometric testing of cylindraical surfaces

Thomas Bluemel, Karl-Edmund Elssner, Ricarda Kafka, Guenter Schulz, Andreas Vogel

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195918
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

Based on our experiences of absolute testing of flats and spherical surfaces we are developing methods for absolute testing of cylindrical surfaces. Three methods are presented and compared with each other. Method I determines the absolute deviations of three cylindrical surfaces from a mathematical cylindrical surface by five measurements. Method II calibrates the interferometer so that afterwards it can be used for absolute testing. Method III determines the absolute deviations of one single cylindrical surface by using two known flats.

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Thomas Bluemel, Karl-Edmund Elssner, Ricarda Kafka, Guenter Schulz, and Andreas Vogel "Absolute interferometric testing of cylindraical surfaces", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195918

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KEYWORDS

Interferometers

Mirrors

Calibration

Error analysis

Spherical lenses

Interferometry

Wavefronts

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