Mach Zehnder interferometer for measuring microlenses

Daniel J. Daly; Michael C. Hutley; Richard F. Stevens

doi:10.1117/12.195919

12 December 1994 Mach Zehnder interferometer for measuring microlenses

Daniel J. Daly, Michael C. Hutley, Richard F. Stevens

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195919
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

The growing interest in microlenses and microlens arrays has created a need for measurement systems to characterize their performance, particularly important being the transmitted wavefront and focal length. A Mach Zehnder interferometer has been built into a microscope body to allow fast, convenient, and accurate measurement of these parameters.

Citation Download Citation

Daniel J. Daly, Michael C. Hutley, and Richard F. Stevens "Mach Zehnder interferometer for measuring microlenses", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195919

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