Scanning local probe interferometer and reflectometer: application to very low relief objects

O. Bergossi; Michel Spajer

doi:10.1117/12.195546

30 November 1994 Scanning local probe interferometer and reflectometer: application to very low relief objects

O. Bergossi, Michel Spajer

Proceedings Volume 2341, Interferometry '94: Interferometric Fiber Sensing; (1994) https://doi.org/10.1117/12.195546
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

For the requirements of nanometrology, a new configuration of scanning interferometric profilometer, using a tapered fiber as emitting and detecting local probe, has been recently developed. The very large versatility allows a classical detection in far field, as well as a superresolution in near-field, for both transparent or nontransparent samples.

Citation Download Citation

O. Bergossi and Michel Spajer "Scanning local probe interferometer and reflectometer: application to very low relief objects", Proc. SPIE 2341, Interferometry '94: Interferometric Fiber Sensing, (30 November 1994); https://doi.org/10.1117/12.195546

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