Annealing studies of As+ implanted HgCdTe and CdTe films grown by molecular beam epitaxy

S. P. Guo; J. M. Zhang; Qin Xi Xie; Shixin Yuan

doi:10.1117/12.190811

26 October 1994 Influence of etching solution for high-T_c superconducting thin film

S. P. Guo, J. M. Zhang, Qin Xi Xie, Shixin Yuan

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190811
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

This paper reports a wet etching technique for the pattern of high-Tc superconducting thin film. The solutions of 3% H₃PO₄, saturated EDTA and saturated NH₄CL are used as the etchants. The samples of YBCO high-Tc superconducting thin film are etched with the etching solutions. The measure results show that the influence of the etching solutions on Tc is related to the bridge width. The measure results for 50 micrometers , 5 micrometers , and 2 micrometers bridge widths are given and the X-T and R-T curves of the samples are provided in this paper.

Citation Download Citation

S. P. Guo, J. M. Zhang, Qin Xi Xie, and Shixin Yuan "Influence of etching solution for high-T_c superconducting thin film", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190811

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available