Fabrication and properties of high-temperature superconducting thin films

Hong-Cheng Li

doi:10.1117/12.190813

26 October 1994 Fabrication and properties of high-temperature superconducting thin films

Hong-Cheng Li

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190813
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

High temperature superconducting thin films of GdBa₂Cu₃O₇ (GBCO) were fabricated by de-magnetron sputtering on SrTiO₃, Zr(Y)O₂ (YSZ), MgO and LaAlO₃ (LAO) single crystal substrates. The X-ray diffraction and TEM analysis showed the films were grown epitaxially with the c-axis perpendicular to the substrates surface. The rocking curves of the film were as narrow as 0.4 degree(s) (FWHM). The zero resistance critical temperature of GBCO could be as high as 92 K, and the critical current density at 77 K and zero field were higher than 3 MA/cm². The reproducibility is very good. Microwave filters were prepared using the GBCO films on LAO. The maximum insert loss of the low pass filers with upper frequency of 7 GHz at 78 K and the band pass filters with the central frequency of 8.9 GHz and band width of 500 MHz at 77 K were 0.76 dB and 1.9 dB, respectively. The properties of infrared bolometers prepared using GBCO films on YSZ with NEP (noise equivalence power) of 1.2 X 10^-11 WHz^-1/2, detectivity D^* of 4.5 X 10⁹ cmHz^1/2/W and responsivity R_v of 1600 V/W have not changed noticeably in the period of half a year with more than 40 warm-cold cycles.

Citation Download Citation

Hong-Cheng Li "Fabrication and properties of high-temperature superconducting thin films", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190813

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