Preparation and properties of [111]-oriented PLT films by RF magnetron

Masatoshi Adachi; Megumi Kagai; Akira Kawabata

doi:10.1117/12.190801

26 October 1994 Preparation and properties of [111]-oriented PLT films by RF magnetron

Masatoshi Adachi, Megumi Kagai, Akira Kawabata

Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190801
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China

Abstract

[111]-oriented PLT films have been successfully grown onto platinum film substrates by the rf-magnetron sputtering method using Pb enriched PLT (85/15) powder targets. The sputtering conditions for growing [111]-oriented films were investigated. Crystallographic identifications of the films were made by the X-ray measurements. Dielectric, ferroelectric and pyroelectric properties of these films were measured. The dielectric constant of the highly [111]-oriented PLT film showed an anomaly at the transition point of around 300 degree(s)C and its value at room temperature was large as 1070, indicating that the PLT thin film with La rich composition is also available for the DRAM because of its large dielectric constant. The D-E hysteresis loops measurement has been carried out using the Sawyer-Tower circuit at 60 Hz. The asymmetric hysteresis loops were observed. The Pr and Ec were 8.5 (mu) C/cm² and 78 kV/cm, respectively. The pyroelectric coefficient of this film was determined as 30nC/cm²K even without a poling treatment. [111]-oriented PLT films sputtered on Pt/Ti/silicon substrates possess desirable properties for potential applications to pyroelectric and memory devices.

Citation Download Citation

Masatoshi Adachi, Megumi Kagai, and Akira Kawabata "Preparation and properties of [111]-oriented PLT films by RF magnetron", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190801

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available