Paper
26 October 1994 Structure quality determination of the Hg1-xCdxTe thin films
Fuju Yu
Author Affiliations +
Proceedings Volume 2364, Second International Conference on Thin Film Physics and Applications; (1994) https://doi.org/10.1117/12.190730
Event: Thin Film Physics and Applications: Second International Conference, 1994, Shanghai, China
Abstract
The study of lattice mismatch strain, composition mutation in Hg1-xCdxTe thin films, and intensive strain field which created from substrate and acrossed all epilayers was nondestructively carried out by X-ray double crystal diffraction and X-ray topography.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Fuju Yu "Structure quality determination of the Hg1-xCdxTe thin films", Proc. SPIE 2364, Second International Conference on Thin Film Physics and Applications, (26 October 1994); https://doi.org/10.1117/12.190730
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KEYWORDS
X-rays

Diffraction

Crystals

Semiconducting wafers

Thin films

X-ray diffraction

Mercury

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