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12 May 1995 Estimation of maximum speed of electromechanical deflectors of light
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Abstract
In the article there is an estimation of the maximum speed of electromagnetic and piezoceramic deflectors. The estimation takes into consideration properties of used materials and working conditions. Analytical dependences are received. They connect the maximum speed, an angle of deflection, and an aperture of light beam. It's found out that the maximum speed of electromagnetic deflectors is 5 - 10 MHz and the maximum speed of piezoceramic deflectors is 1 - 3 MHz. A mathematical model of the electromechanical deflector is elaborated. Mathematical simulation of transitional processes is conducted. Influence on the transitional process of the first and the second mechanical resonance was investigated. An experimental research of deflectors with the maximum parameters was made.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yury V. Larchenko, Alexander M. Leonov, and Sergei Zhook "Estimation of maximum speed of electromechanical deflectors of light", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209051
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