XY scan engine with microradian accuracy

Jean I. Montagu; Herman DeWeerd; Peter Honkanen

doi:10.1117/12.209049

12 May 1995 XY scan engine with microradian accuracy

Jean I. Montagu, Herman DeWeerd, Peter Honkanen

Proceedings Volume 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping; (1995) https://doi.org/10.1117/12.209049
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

This paper analyzes the sources of error which shape the accuracy of a flat field raster scanning engine. It briefly describes the critical characteristics of the optical elements, scanners, electronics, laser, and structural design selected to build an engine with a system of accuracy of 0.35 micron, a 3.5 micron spot, and a telecentric work area of 25 mm diameter.

Citation Download Citation

Jean I. Montagu, Herman DeWeerd, and Peter Honkanen "XY scan engine with microradian accuracy", Proc. SPIE 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping, (12 May 1995); https://doi.org/10.1117/12.209049

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