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10 April 1995 Integration of diffractive lenses with addressable vertical-cavity laser arrays
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Abstract
An optical interconnection system is being developed to provide vertical, digital data channels for stacked multichip modules. A key component of the system is an array of individually addressable vertical-cavity surface-emitting lasers with diffractive lenses integrated into the substrate to control beam divergence and direction. The lenses were fabricated by direct-write e-beam lithography and reactive ion beam etching into the GaAs substrate. Preliminary device performance data and the design and fabrication issues are discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mial E. Warren, Tu Du, Joel R. Wendt, G. Allen Vawter, Richard Franklin Carson, Kevin L. Lear, Sean P. Kilcoyne, Richard P. Schneider Jr., and John C. Zolper "Integration of diffractive lenses with addressable vertical-cavity laser arrays", Proc. SPIE 2398, Circular-Grating Light-Emitting Sources, (10 April 1995); https://doi.org/10.1117/12.206343
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