Scattering From High Efficiency Diffraction Gratings

G. J. Dunning; M. L. Minden

doi:10.1117/12.965662

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10 February 1981 Scattering From High Efficiency Diffraction Gratings

G. J. Dunning, M. L. Minden

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Proceedings Volume 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I; (1981) https://doi.org/10.1117/12.965662
Event: 24th Annual Technical Symposium, 1980, San Diego, United States

Abstract

Scatter from high efficiency, reflective diffraction gratings has been characterized. Three major types of scatter are identified: (1) random, which occurs over 27 s.r., (2) band or ghost scatter which occurs in the plane of incidence and (3) structured scatter which is a symmetrical pattern repeated about each order. Measurements were taken at 10.6 pm on gratings made by ruling, ion-etching, holography, or a combination of these techniques. We have found that the characteristic scatter from these high efficiency gratings depends strongly on the way the gratings are fabricated.

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G. J. Dunning and M. L. Minden "Scattering From High Efficiency Diffraction Gratings", Proc. SPIE 0240, Periodic Structures, Gratings, Moire Patterns, and Diffraction Phenomena I, (10 February 1981); https://doi.org/10.1117/12.965662

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