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17 March 1995 Micro-optomechanical switch for optical fiber networks
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Abstract
A 1:2 Micro-Opto-Mechanical switch has been achieved using the combination of 2 technologies: `Integrated Optics' and `Micromachining on Silicon'. The commutation is obtained by means of the mechanical deflection of a cantilever beam driven by an electrostatic force. The first devices show promising characteristics.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Ollier, Pierre Labeye, and Patrick Louis Mottier "Micro-optomechanical switch for optical fiber networks", Proc. SPIE 2401, Functional Photonic Integrated Circuits, (17 March 1995); https://doi.org/10.1117/12.205029
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