Reverse proton exchange in LiTaO3 and LiNbO3 for buried optical waveguides

Yuri N. Korkishko; Vyacheslav A. Fedorov; S. V. Katin; Andrey V. Kondrat'ev

doi:10.1117/12.205027

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17 March 1995 Reverse proton exchange in LiTaO₃ and LiNbO₃ for buried optical waveguides

Yuri N. Korkishko, Vyacheslav A. Fedorov, S. V. Katin, Andrey V. Kondrat'ev

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Proceedings Volume 2401, Functional Photonic Integrated Circuits; (1995) https://doi.org/10.1117/12.205027
Event: Photonics West '95, 1995, San Jose, CA, United States

Abstract

We describe the fabrication and properties of optical waveguides formed in Z-cut proton exchanged LiTaO₃ and X- and Z-cuts annealed proton exchanged LiNbO₃ structures by reverse proton exchange Li⁺ yields H⁺ in the LiNO₃ and LiNO₃-KNO₃-NaNO₃ melts at 280 - 340 degree(s)C. Surface waveguides, supporting ordinary polarization modes, as well as the buried waveguides for extraordinary polarization modes have been produced. The diffusion constant D_o and the activation energy Q for the reverse proton exchange process in LiTaO₃ were calculated to be 2.95 (DOT) 10⁷ micrometers ²/h and 97.66 kJ/mol, respectively. A surface decrease of the ordinary refractive index (Delta) n_oequals -0.034 in H:LiTaO₃ waveguides with (Delta) n_eequals 0.026 was estimated from direct measurements. The reverse proton exchange method was used to form buried waveguides in the well annealed proton exchanged lithium niobate waveguides. The different crystal phases were identified in APE LiNbO₃. The relationships between extraordinary and ordinary index changes in APE LiNbO₃ waveguides annealed at different temperatures (330 degree(s)C and 400 degree(s)C) were obtained.

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Yuri N. Korkishko, Vyacheslav A. Fedorov, S. V. Katin, and Andrey V. Kondrat'ev "Reverse proton exchange in LiTaO₃ and LiNbO₃ for buried optical waveguides", Proc. SPIE 2401, Functional Photonic Integrated Circuits, (17 March 1995); https://doi.org/10.1117/12.205027

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