Three-dimensional (3D) displacement measurement by a holographic interferometric microscope

Oliver Kruschke; Guenther K.G. Wernicke; Hartmut Gruber

doi:10.1117/12.206228

12 April 1995 Three-dimensional (3D) displacement measurement by a holographic interferometric microscope

Oliver Kruschke, Guenther K.G. Wernicke, Hartmut Gruber

Proceedings Volume 2406, Practical Holography IX; (1995) https://doi.org/10.1117/12.206228
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1995, San Jose, CA, United States

Abstract

A holographic interferometric microscope is presented, which combines conjugate reconstruction and two-reference beam method to apply the static evaluation method with 3 illumination directions. In this way the determination of every component of small displacements over objects which are smaller than a millimeter is possible. A solder bond and a surface mounted resistor were used to test the performance of the proposed hologram- microscopic arrangement. The thermal deformations under operation conditions were investigated. The orthogonal displacement components were calculated from the experimental results and compared with the expected deformation behavior.

Citation Download Citation

Oliver Kruschke, Guenther K.G. Wernicke, and Hartmut Gruber "Three-dimensional (3D) displacement measurement by a holographic interferometric microscope", Proc. SPIE 2406, Practical Holography IX, (12 April 1995); https://doi.org/10.1117/12.206228

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