Metalorganic molecular beam epitaxy of ZnS for flat-panel displays

Wusheng Tong; X. Shen; Brent K. Wagner; Tuyen K. Tran; Bill Ogle; W. G. Park; T. Yang; Christopher J. Summers

doi:10.1117/12.207512

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24 April 1995 Metalorganic molecular beam epitaxy of ZnS for flat-panel displays

Wusheng Tong, X. Shen, Brent K. Wagner, Tuyen K. Tran, Bill Ogle, W. G. Park, T. Yang, Christopher J. Summers

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Proceedings Volume 2408, Liquid Crystal Materials, Devices, and Displays; (1995) https://doi.org/10.1117/12.207512
Event: IS&T/SPIE's Symposium on Electronic Imaging: Science and Technology, 1995, San Jose, CA, United States

Abstract

Thin film luminescent layers have applications in electroluminescent devices and potential application to other displays with high brightness and high resolution requirements. Displays such as field emission devices where high current densities, high electric fields, and small dimensional tolerances are present require phosphors which have high maintenance qualities and good adherence to the face plate. To increase the luminance of EL displays high quality phosphor layers are necessary. In this study, we report the growth kinetics studies of ZnS and the properties of high quality ZnS layers grown by metalorganic molecular beam epitaxial deposition for display applications. The layers' structural and optical properties have been characterized by x-ray diffraction, electron and optical microscopy, and photoluminescence spectroscopy. These measurements were made as a function of the growth and process conditions such as growth temperature, flux ratios, different sulfur precursors, etc. PL spectra exhibited free- and bound-exciton transitions indicative of high quality ZnS material.

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Wusheng Tong, X. Shen, Brent K. Wagner, Tuyen K. Tran, Bill Ogle, W. G. Park, T. Yang, and Christopher J. Summers "Metalorganic molecular beam epitaxy of ZnS for flat-panel displays", Proc. SPIE 2408, Liquid Crystal Materials, Devices, and Displays, (24 April 1995); https://doi.org/10.1117/12.207512

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