Paper
14 July 1995 Absorption of ArF-, KrF-, and Xef-laser radiation in optical materials at the moment of E-beam influence
V. S. Barabanov, P. B. Sergeyev
Author Affiliations +
Abstract
The results of measurements of the optical density, induced at the moment of influence of the e-beam on crystal MgF2, CaF2, BaF2, Al2O3, and also on different silica glasses, performed using laser radiation at 193, 248, and 353 nm, are presented and discussed.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
V. S. Barabanov and P. B. Sergeyev "Absorption of ArF-, KrF-, and Xef-laser radiation in optical materials at the moment of E-beam influence", Proc. SPIE 2428, Laser-Induced Damage in Optical Materials: 1994, (14 July 1995); https://doi.org/10.1117/12.213745
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KEYWORDS
Absorption

Glasses

Lawrencium

Crystals

Silica

Magnesium fluoride

Mirrors

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