Error measure comparison of currently employed dose-modulation schemes for e-beam proximity effect control

Martin C. Peckerar; Christie R. Marrian

doi:10.1117/12.209187

19 May 1995 Error measure comparison of currently employed dose-modulation schemes for e-beam proximity effect control

Martin C. Peckerar, Christie R. Marrian

Proceedings Volume 2437, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V; (1995) https://doi.org/10.1117/12.209187
Event: SPIE's 1995 Symposium on Microlithography, 1995, Santa Clara, CA, United States

Abstract

Standard matrix inversion methods of e-beam proximity correction are compared with a variety of pseudoinverse approaches based on gradient descent. It is shown that the gradient descent methods can be modified using 'regularizers' (terms added to the cost function minimized during gradient descent). This modification solves the 'negative dose' problem in a mathematically sound way. Different techniques are contrasted using a weighted error measure approach. It is shown that the regularization approach leads to the highest quality images. In some cases, ignoring negative doses yields results which are worse than employing an uncorrected dose file.

Citation Download Citation

Martin C. Peckerar and Christie R. Marrian "Error measure comparison of currently employed dose-modulation schemes for e-beam proximity effect control", Proc. SPIE 2437, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V, (19 May 1995); https://doi.org/10.1117/12.209187

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