Author Affiliations +
Susan M. Wilson,1 S. Sohail H. Naqvi,1 John Robert McNeil,1 Herschel M. Marchman,2 Blaine D. Johs,3 Roger H. French,4 Franklin D. Kalk5
1Univ. of New Mexico (United States)
2AT&T Bell Labs. (United States)
3J.A. Woollam Co., Inc. (United States)
4DuPont Central Science and Engineering (United States)
5DuPont Photomasks, Inc. (United States)