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22 May 1995 Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry
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Susan M. Wilson, S. Sohail H. Naqvi, John Robert McNeil, Herschel M. Marchman, Blaine D. Johs, Roger H. French, and Franklin D. Kalk "Metrology of etched quartz and chrome embedded phase shift gratings using scatterometry", Proc. SPIE 2439, Integrated Circuit Metrology, Inspection, and Process Control IX, (22 May 1995); https://doi.org/10.1117/12.209233
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