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8 May 1995 Development of a rotary inchworm piezoelectric motor
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The development of a rotary inchworm-motor using piezoelectric actuators is presented. The motor design has the advantage of a macro and micro stepper motor with high torque and speed. The design is capable of fast angular positioning with micro level accuracy. The rotary motor, as designed, can also be used as a clutch/brake mechanism. A constructed prototype motor along with its characteristics are presented. The motor consists of a torsional section that provides angular displacement and torque, and two alternating clamping sections which provide the holding force. The motor relies on the principal piezoelectric coupling coefficient (d33) with no torsional piezoelectric elements used. The design eliminates bending moment and shear applied to the actuator elements, increasing its torque capability. An innovative flexure design has been introduced, and consideration has been given to contact elements which affect the performance of the motor; these issues are explored and discussed. Experiments are performed demonstrating a motor prototype based on the aforementioned design considerations.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Khanh A. Duong and Ephrahim Garcia "Development of a rotary inchworm piezoelectric motor", Proc. SPIE 2443, Smart Structures and Materials 1995: Smart Structures and Integrated Systems, (8 May 1995);

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