Soft x-ray imaging and vector diffraction theory

Ronald E. Burge; XiaoCong Yuan

doi:10.1117/12.221665

25 September 1995 Soft x-ray imaging and vector diffraction theory

Ronald E. Burge, XiaoCong Yuan

Proceedings Volume 2516, X-Ray Microbeam Technology and Applications; (1995) https://doi.org/10.1117/12.221665
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A comprehensive computational analysis of soft x-ray imaging has been undertaken for both thin transmitting objects and lossy dielectric, potentially binary, objects and some representative results are given here. Both near-field and far-field computations are considered. The theoretical treatment derives from Maxwell's vector electromagnetic equations rather than scalar diffraction theory. A range of computational approaches is used in the computations ranging from the integral method, to the coupled wave method, and the finite element methods. The relationships between these methods are considered. The results bear upon a range of imaging protocols from contact x-ray images and images taken with high resolution zone plate optics with feature dimensions of a few wavelengths to x-ray masks with sub-micron feature sizes interpreted as lossy waveguides several hundreds of x-ray wavelengths thick. Consideration is also given to the use of vector theory in the investigation of the focal plan intensity profile of a circular Fresnel zone plate when the widths of the outermost zones approach wavelength dimensions.

Citation Download Citation

Ronald E. Burge and XiaoCong Yuan "Soft x-ray imaging and vector diffraction theory", Proc. SPIE 2516, X-Ray Microbeam Technology and Applications, (25 September 1995); https://doi.org/10.1117/12.221665

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