Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode

Aaron W. Baum; William E. Spicer; Roger Fabian W. Pease; Kenneth A. Costello; Verle W. Aebi

doi:10.1117/12.221575

25 September 1995 Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode

Aaron W. Baum, William E. Spicer, Roger Fabian W. Pease, Kenneth A. Costello, Verle W. Aebi

Author Affiliations +

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221575
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Brightness, energy spread and emission area are key parameters of electron sources for instruments such as electron microscopes and electron beam lithography tools. In developing transmission-mode NEA photocathodes as sources for these applications, these characteristics have been measured in specialized sealed tubes. Average lateral energies were measured at 63 meV for 1.5 micron thick photocathode, and 83 meV for a 0.5 micron thick photocathode, which was known to be emitting `hot' electrons. A current density of 841 A/cm² was obtained from a 1.7 micron diameter emission area. This high current density can be explained in terms of lateral drift and diffusion of surface trapped electrons. Combined angular and current density data indicate a brightness of approximately 10⁸ A/cm²-sr at 3 kV.

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Aaron W. Baum, William E. Spicer, Roger Fabian W. Pease, Kenneth A. Costello, and Verle W. Aebi "Negative electron affinity photocathodes as high-performance electron sources. Part 1: achievement of ultrahigh brightness from an NEA photocathode", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221575

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