Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Henryk Fiedorowicz; Andrzej Bartnik; Miroslaw Szczurek; Piotr Parys; Peter M. Celliers; Luiz Barroca Da Silva; Stanley Mrowka; C. Brent Dane; Dennis L. Matthews; Joseph A. Abate

doi:10.1117/12.220997

18 September 1995 Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target

Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek, Piotr Parys, Peter M. Celliers, Luiz Barroca Da Silva, Stanley Mrowka, C. Brent Dane, Dennis L. Matthews, Joseph A. Abate

Author Affiliations +

Proceedings Volume 2523, Applications of Laser Plasma Radiation II; (1995) https://doi.org/10.1117/12.220997
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Plasmas produced from laser-irradiated gas puff xenon targets, created by pulsed injection of xenon with high-pressure solenoid valve, offer the possibility of realizing a debrisless x-ray point source for the x-ray lithography applications. In this paper we present results of the experimental investigations on the x-ray generation from a gas puff xenon target irradiated with nanosecond high-power laser pulses produced using two different laser facilities; a Nd:glass laser operating at 1.06 micrometers , which generated 10-15 J pulses in 1 ns FWHM, and Nd:glass slab laser, producing pulses of 10 ns duration with energy reaching 12 J for a 0.53 micrometers wavelength or 20 J for 1.05 micrometers . To study the x-ray emission different x-ray diagnostic methods have been used. X-ray spectra were registered using a flat CsAP crystal spectrograph with an x-ray film or a curved KAP crystal spectrograph with a convex curvature coupled to an x-ray CCD readout detector. X-ray images have been taken using pinhole cameras with an x-ray film or a CCD array. X-ray yield was measured with the use of semiconductor detectors (silicon photodiodes or diamond photoconductors).

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Henryk Fiedorowicz, Andrzej Bartnik, Miroslaw Szczurek, Piotr Parys, Peter M. Celliers, Luiz Barroca Da Silva, Stanley Mrowka, C. Brent Dane, Dennis L. Matthews, and Joseph A. Abate "Generation of soft x-ray radiation by laser irradiation of a gas puff xenon target", Proc. SPIE 2523, Applications of Laser Plasma Radiation II, (18 September 1995); https://doi.org/10.1117/12.220997

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