Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits

Srinath Kalluri; Antao Chen; Vadim Chuyanov; Mehrdad Ziari; William H. Steier; Larry Raymond Dalton

doi:10.1117/12.222809

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5 October 1995 Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits

Srinath Kalluri, Antao Chen, Vadim Chuyanov, Mehrdad Ziari, William H. Steier, Larry Raymond Dalton

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Proceedings Volume 2527, Nonlinear Optical Properties of Organic Materials VIII; (1995) https://doi.org/10.1117/12.222809
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

To demonstrate the feasibility of integrating polymer electro-optic devices on Si circuitry, we have vertically integrated a demonstration slab phase modulator on nonplanar VLSI circuitry. Optical loss measurements for waveguides fabricated on planarized circuits demonstrate that more practical devices like channel phase and Mach-Zehnder amplitude modulators can easily be integrated onto the circuits.

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Srinath Kalluri, Antao Chen, Vadim Chuyanov, Mehrdad Ziari, William H. Steier, and Larry Raymond Dalton "Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits", Proc. SPIE 2527, Nonlinear Optical Properties of Organic Materials VIII, (5 October 1995); https://doi.org/10.1117/12.222809

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