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5 October 1995 Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits
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Abstract
To demonstrate the feasibility of integrating polymer electro-optic devices on Si circuitry, we have vertically integrated a demonstration slab phase modulator on nonplanar VLSI circuitry. Optical loss measurements for waveguides fabricated on planarized circuits demonstrate that more practical devices like channel phase and Mach-Zehnder amplitude modulators can easily be integrated onto the circuits.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Srinath Kalluri, Antao Chen, Vadim Chuyanov, Mehrdad Ziari, William H. Steier, and Larry Raymond Dalton "Integration of polymer electro-optic devices on nonplanar silicon-integrated circuits", Proc. SPIE 2527, Nonlinear Optical Properties of Organic Materials VIII, (5 October 1995); https://doi.org/10.1117/12.222809
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