Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining

Gleb V. Vdovin; Simon Middelhoek; Marian Bartek; Pasqualina M. Sarro; Dimitri Solomatine

doi:10.1117/12.217730

25 August 1995 Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining

Gleb V. Vdovin, Simon Middelhoek, Marian Bartek, Pasqualina M. Sarro, Dimitri Solomatine

Author Affiliations +

Proceedings Volume 2534, Adaptive Optical Systems and Applications; (1995) https://doi.org/10.1117/12.217730
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

Fabrication of electrostatically controlled membrane adaptive mirrors produced with IC- compatible micromachining is reported. Mirrors have rectangular reflective apertures with sizes varied from 1 by 1 mm up to 11 by 11 mm. The surface of the flexible mirror is formed by a free-suspended 0.5 micrometer-thick silicon nitride film coated with a thin reflective layer of aluminum. The rms deviation from plane for a mirror having one square centimeter aperture is 0.2 micrometer, mirrors with optical quality up to lambda/20 may be selected from batch. Up to sixteen mirrors can be fabricated on one four-inch silicon wafer. Optical figure of the reflective membrane is controlled by an array of 1...100 electrostatic actuators of arbitrary shape placed 20...100 micrometer beneath the reflecting membrane. Technology of fabrication is flexible enough to allow for fabrication of varifocal mirrors, multichannel adaptive mirrors, and spatial light modulators. These and some other applications are discussed in the report.

Citation Download Citation

Gleb V. Vdovin, Simon Middelhoek, Marian Bartek, Pasqualina M. Sarro, and Dimitri Solomatine "Technology, characterization, and applications of adaptive mirrors fabricated with IC-compatible micromachining", Proc. SPIE 2534, Adaptive Optical Systems and Applications, (25 August 1995); https://doi.org/10.1117/12.217730

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