Common path interferometer for flat surface measurement

Katsuyuki Okada; Shigeki Kawabata; Toshio Honda

doi:10.1117/12.215610

2 August 1995 Common path interferometer for flat surface measurement

Katsuyuki Okada, Shigeki Kawabata, Toshio Honda

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215610
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

In this paper, we propose a new common path interferometer, that needs only typical beam splitters to split and couple the reference and object beams. Some experiments show the common path configuration reduces the influence of vibration of the mirror effectively.

Citation Download Citation

Katsuyuki Okada, Shigeki Kawabata, and Toshio Honda "Common path interferometer for flat surface measurement", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215610

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