Design of a micromachined pressure sensor for endoscopic graspers

Manish Mehta; M. Parameswaran; Shahram Payandeh

doi:10.1117/12.228637

18 December 1995 Design of a micromachined pressure sensor for endoscopic graspers

Manish Mehta, M. Parameswaran, Shahram Payandeh

Proceedings Volume 2593, Microrobotics and Micromechanical Systems; (1995) https://doi.org/10.1117/12.228637
Event: Photonics East '95, 1995, Philadelphia, PA, United States

Abstract

A micromachined pressure sensor that is suitable for integrating on the tip of the grasper of an endoscopic surgical instrument is presented. Device operation to detect the pressure applied on the body tissues during endoscopic surgery is based on the change in the capacitance between a 5 micrometers thin boron doped silicon membrane and 1 micrometers thick Aluminium electrodes sputtered inside 15 micrometers deep cavities etched in glass. The design, structural optimization for obtaining high sensitivity and the fabrication process for the device are presented. The device has a peak sensitivity of 500 pFmm²/N. The range of the pressure sensor is from 0.01 N/mm² up to 0.1 N/mm² which is suitable for measuring the pressure on various tissues inside the body during endoscopic surgery. Since the device simulates the teeth like surface of the existing grasper it is possible to integrate the device on the tip of the grasper of the endoscopic surgical instrument.

Citation Download Citation

Manish Mehta, M. Parameswaran, and Shahram Payandeh "Design of a micromachined pressure sensor for endoscopic graspers", Proc. SPIE 2593, Microrobotics and Micromechanical Systems, (18 December 1995); https://doi.org/10.1117/12.228637

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