Phase measuring interferometry algorithms

Charles Joenathan

doi:10.1117/12.216847

18 August 1995 Phase measuring interferometry algorithms

Charles Joenathan

Proceedings Volume 2622, Optical Engineering Midwest '95; (1995) https://doi.org/10.1117/12.216847
Event: Optical Engineering Midwest '95, 1995, Chicago, IL, United States

Abstract

In this paper further discussions on some new methods proposed in an earlier paper on phase stepping interferometry is detailed. These studies reveal that certain algorithms are more sensitive to miscalibration and nonlinearity and can be better candidates to detect the presence of phase shifter miscalibration or nonlinearity. A simplified approach to the understanding of the error and its reduction/elimination in phase shifting interferometry are also presented.

Citation Download Citation

Charles Joenathan "Phase measuring interferometry algorithms", Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); https://doi.org/10.1117/12.216847

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