Use of ion beam sputtering in the fabrication of high-quality optical coatings for laser and telecommunication applications

Arthur T. Howe; Dennis D. Phillips

doi:10.1117/12.216797

18 August 1995 Use of ion beam sputtering in the fabrication of high-quality optical coatings for laser and telecommunication applications

Arthur T. Howe, Dennis D. Phillips

Author Affiliations +

Proceedings Volume 2622, Optical Engineering Midwest '95; (1995) https://doi.org/10.1117/12.216797
Event: Optical Engineering Midwest '95, 1995, Chicago, IL, United States

Abstract

Many lasers and telecommunication devices demand sophisticated optics requiring precise control of the thin film coating process. The advantages of ion beam sputtering in providing a reproducible and accurately controlled process will be discussed, and the use of statistical process control for process refinement will be described. Applications to difficult coatings such as dichroic and trichroic filters for diode pumped solid state lasers, Brewster angle plate polarizers, and edge filters for telecommunication devices will be presented.

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Arthur T. Howe and Dennis D. Phillips "Use of ion beam sputtering in the fabrication of high-quality optical coatings for laser and telecommunication applications", Proc. SPIE 2622, Optical Engineering Midwest '95, (18 August 1995); https://doi.org/10.1117/12.216797

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