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18 September 1995 Polygonal gratings for wafer scale one-to-many optical clock signal distribution
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In contrast to volume holographic material where 1-to-many fanouts are realized using multiplexed volume holograms, we report in this paper the first Si-based surface relief polygonal gratings aiming at optical clock signal distribution application. Surface relief grating with 1 micrometers period (0.5 micrometers feature size) was fabricated using reactive ion beam etch. Both hexagonal and square gratings were demonstrated for 1-to-4 and 1-to-6 fanouts. Surface- normal input and output coupling schemes were carried out with efficiency as high as 65%. Employment of substrate modes in silicon instead of the guided modes greatly releases the required grating spacing for the demonstrated two-way surface-normal coupling. Clock signal distribution operating at 1.3 micrometers with 7.5 GHz clock speed was demonstrated with signal to noise ratio as high as 60 dB.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ray T. Chen, O. Erchov, and Luke A. Graham "Polygonal gratings for wafer scale one-to-many optical clock signal distribution", Proc. SPIE 2638, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II, (18 September 1995);

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