Electroplated nickel mold insert for LIGA

Vikas Galhotra; Venkat Sangishetty; Evan Ma; Kevin W. Kelly

doi:10.1117/12.221273

19 September 1995 Electroplated nickel mold insert for LIGA

Vikas Galhotra, Venkat Sangishetty, Evan Ma, Kevin W. Kelly

Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221273
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

The LIGA process is being developed at Louisiana State University (LSU) to mass produce high aspect ratio microstructures. One component of the LIGA process is the manufacture of mold inserts. The progress associated with manufacturing an electroplated nickel mold insert is described in this paper. Unique features of our nickel electrodeposition procedures are discussed.

Citation Download Citation

Vikas Galhotra, Venkat Sangishetty, Evan Ma, and Kevin W. Kelly "Electroplated nickel mold insert for LIGA", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221273

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