Fabrication of bulk silicon holding structures for mounting of optical fibers in v-grooves

Carola Strandman; Ylva Baecklund

doi:10.1117/12.221286

19 September 1995 Fabrication of bulk silicon holding structures for mounting of optical fibers in v-grooves

Carola Strandman, Ylva Baecklund

Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221286
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

A set of micromachined structures for holding optical fibers in anisotropically etched v- grooves has been produced. The structures are made of bulk silicon and etched in the same etch step as the aligning v-grooves, using the photo voltaic electrochemical etch stop technique (PHET). Most etching was performed in KOH solutions, however, a shallow investigation was made on the PHET technique in tetra methyl ammonium hydroxide. The structures were produced in a variety of shapes based on cantilever beams and doubly clamped bridges. They facilitate the mounting of optical fibers substantially and guide the fibers into position in the grooves.

Citation Download Citation

Carola Strandman and Ylva Baecklund "Fabrication of bulk silicon holding structures for mounting of optical fibers in v-grooves", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221286

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