Microstructuring by excimer laser

Erol C. Harvey; Phil T. Rumsby; Malcolm C. Gower; Jason L. Remnant

doi:10.1117/12.221283

19 September 1995 Microstructuring by excimer laser

Erol C. Harvey, Phil T. Rumsby, Malcolm C. Gower, Jason L. Remnant

Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221283
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Excimer laser ablation provides the micromachining engineer with a unique tool for patterning, cutting, and structuring a wide variety of materials, including ceramics, glasses, and polymers. The short pulse (20 ns) ultra violet laser beam is used for nonthermal ablative material removal producing structures with a depth resolution of the order of 0.1 micrometers and spatial resolutions of the order of 1 micrometers or better. Careful control of laser dose (usually done using CNC systems) enables multi-level machining to be performed producing 3D microstructures which may be used directly, or as mold tools for laser-LIGA replication. This talk aims to illustrate both the possibilities, and limitations, of micormachining by excimer laser ablation, and will highlight some practical examples of structures and devices manufactured using this tool, many of which are currently in or near commercial production.

Citation Download Citation

Erol C. Harvey, Phil T. Rumsby, Malcolm C. Gower, and Jason L. Remnant "Microstructuring by excimer laser", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221283

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available