Tunneling tip protection for a bulk micromachined accelerometer

Paul M. Zavracky; Bob McClelland; Jianchao Wang; Frank T. Hartley

doi:10.1117/12.221289

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19 September 1995 Tunneling tip protection for a bulk micromachined accelerometer

Paul M. Zavracky, Bob McClelland, Jianchao Wang, Frank T. Hartley

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Proceedings Volume 2639, Micromachining and Microfabrication Process Technology; (1995) https://doi.org/10.1117/12.221289
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Ultrasensitive accelerometers are needed by NASA for the measurement of orbital drag. We have designed an accelerometer capable of measuring 10^-8. In this paper, a method for fabricating a bulk micromachined accelerometer which incorporates a tunneling tip is presented. To meet sensitivity sepcifications, a weak spring and large mass are needed. However, these represent a delicate mechanism and a method of protection is provided by electrostatically clamping the proof mass in a fixed position. The effectiveness of the electrostatic clamp has been measured. It is found that clamping against an acceleration of 200 g is possible with voltages as low as 30 volts.

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Paul M. Zavracky, Bob McClelland, Jianchao Wang, and Frank T. Hartley "Tunneling tip protection for a bulk micromachined accelerometer", Proc. SPIE 2639, Micromachining and Microfabrication Process Technology, (19 September 1995); https://doi.org/10.1117/12.221289

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