FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration

Eugene Y. Tsiang; Edwin M. Kellogg; Don Porterfield

doi:10.1117/12.222637

26 September 1995 FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration

Eugene Y. Tsiang, Edwin M. Kellogg, Don Porterfield

Author Affiliations +

Proceedings Volume 2640, Microlithography and Metrology in Micromachining; (1995) https://doi.org/10.1117/12.222637
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Focused ion-beams have proved to be a superior means of fabricating holes between 5 and 20 microns in diameter, through gold and tungsten sheets over 40 microns thick. These holes are milled with an FEI FIB800 Focused Ion Beam Workstation using a Ga liquid metal source, with and without an enhancement gaseous etchant. They will be used as apertures for detectors that probe the point response function of the X-ray optics (Wolter Type-I mirror pairs), which form part of the NASA Advanced X-ray Astrophysical Facility. It is found that both pure milling and gas-assisted etching produced micron-sized holes of a quality superior to those produced by laser beam sputtering.

Citation Download Citation

Eugene Y. Tsiang, Edwin M. Kellogg, and Don Porterfield "FIB 601 focused ion beam fabrication of micron-sized apertures for the NASA AXAF x-ray telescope prelaunch calibration", Proc. SPIE 2640, Microlithography and Metrology in Micromachining, (26 September 1995); https://doi.org/10.1117/12.222637

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