Static micromixer built up in silicon

Norbert Schwesinger; Thomas Frank

doi:10.1117/12.221163

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15 September 1995 Static micromixer built up in silicon

Norbert Schwesinger, Thomas Frank

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Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221163
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

The mixing of chemical components becomes more and more important. Especially in the field of micro analysis systems a mixing procedure of different solutions is often required. We have developed a static micromixer built up in silicon. The design and fabrication procedures of the micromixer allow the integration of other microcomponents like pumps, valves or sensors. The static micromixer consists of two structured silicon wafers. The structured surfaces are bonded together by using a low temperature silicon direct bonding process. The structure of the mixer consists of several identical mixing elements. The size of one element is about 500 micrometers ^*500 micrometers ^* 720 micrometers . The internal volume of one element is about 0.0001 ml. Each element consists of two or more microchannels for different liquids to be mixed. In a first step of the mixing procedure the liquid streams are arranged separately in one horizontal layer. This can be achieved by a connection of the microchannels. In a second step step the whole arate microchannels. These microchannels act as inlet for the next mixing element. We found a homogenous mixing after about 5 mixing elements for mixable liquids. Not mixable liquids will be dispensed after 16-20 mixing elements.

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Norbert Schwesinger and Thomas Frank "Static micromixer built up in silicon", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221163

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